JPS62197849U - - Google Patents
Info
- Publication number
- JPS62197849U JPS62197849U JP7441687U JP7441687U JPS62197849U JP S62197849 U JPS62197849 U JP S62197849U JP 7441687 U JP7441687 U JP 7441687U JP 7441687 U JP7441687 U JP 7441687U JP S62197849 U JPS62197849 U JP S62197849U
- Authority
- JP
- Japan
- Prior art keywords
- phase growth
- gas
- vapor phase
- heating jig
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000012071 phase Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7441687U JPS62197849U (en]) | 1987-05-20 | 1987-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7441687U JPS62197849U (en]) | 1987-05-20 | 1987-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197849U true JPS62197849U (en]) | 1987-12-16 |
Family
ID=30919612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7441687U Pending JPS62197849U (en]) | 1987-05-20 | 1987-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197849U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5480071A (en) * | 1977-12-09 | 1979-06-26 | Hitachi Ltd | Vapor growth method for semiconductor layer |
| JPS54144867A (en) * | 1978-05-04 | 1979-11-12 | Hitachi Ltd | Gas phase growth method of semiconductor |
-
1987
- 1987-05-20 JP JP7441687U patent/JPS62197849U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5480071A (en) * | 1977-12-09 | 1979-06-26 | Hitachi Ltd | Vapor growth method for semiconductor layer |
| JPS54144867A (en) * | 1978-05-04 | 1979-11-12 | Hitachi Ltd | Gas phase growth method of semiconductor |
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